Abstract: Electrical impedance matching network (EIMN) is important for the piezoelectric transducer to transmit high-power acoustic signal over a wide bandwidth. Different from the impedance matching ...
High-SPL Air-Coupled Piezoelectric Micromachined Ultrasonic Transducers Based on 36% ScAlN Thin-Film
Abstract: In this paper, air-coupled piezoelectric micromachined ultrasonic transducers (PMUTs) using 36% scandiumdoped aluminum nitride (ScAlN) thin-film are presented. ScAlN is known to exhibit ...
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