Independently inspected project achieved an average surface profile of approximately 3.5 mils and a coating-ready, near-white ...
Abstract: Line-to-line leakage and breakdown mechanisms in 18–26 nm on-pitch Ruthenium and airgap interconnects, fabricated using a direct metal etch process are studied. A correlation between the ...
Abstract: To solve problems of the large dimensional and angular errors during robot-aided bending, a bending precision control and optimization method that combines visual detection and model ...